Diffusion contributions to line end shortening in 193-nm photolithography | 東京工業大学附属図書館文献データベース

Blank Cover Image

Diffusion contributions to line end shortening in 193-nm photolithography

著者名:

Seung-Chan Moon

さらに 7 件

掲載資料名:

Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5753(2)

発行年:

2005

パート:

2

開始ページ:

1040

終了ページ:

1048

総ページ数:

9

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819457332 [0819457337]

言語:

英語

請求記号:

P63600/5753-2

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014978
シリーズID:	PA00000029
会議名:	SPIE Advanced Lithography : Advances in resist technology and processing
回次:	2005 : 22th
会議開催地:	San Jose, CA, USA
会議開催年:	2005.02.28-2005.03.02
論文注記:	22th Symposium on Advances in resist technology and processing, 28 February-2 March, 2005, San Jose, California, USA

類似資料:

1 国際会議録 Studies on leaching of photoresist components by water Seung Keun Oh, Jong Yong Kim, Young Ho Jung, Jae Woo Lee, Deog Bae Kim, Jaehyun Kim, Geun Su Lee, Sung Koo Lee, Keun Do … SPIE - The International Society of Optical Engineering	7 国際会議録 Optical and Structural Prorerties of InAs Epilayer on Graded InGaAs Kim, Gu Hyun, Choi, Jung Bum, Lee, Joo In, Kang, Se-Kyung, Ban, Seung Il, Kim, Jin Soo, Kim, Jong Su, Lee, Sang Heon, … Materials Research Society
2 国際会議録 Simulation of thermal resist flow process Sang-Kon Kim, Ilsin An, Hye-Keun Oh, Sun Muk Lee, Cheolkyu Bok, Seung Chan Moon SPIE - The International Society of Optical Engineering	8 国際会議録 Organosiloxane based bottom antireflective coatings for 193nm lithography Son, E.-K., Kim, J.-W., Lee, S.-H., Park, C.-S., Lee, J.-W., Kim, J., Lee, G.-S., Lee, S.-K., Ban, K.-D., Jung, J.-C., … SPIE - The International Society of Optical Engineering
3 国際会議録 Contact hole reflow by finite element method (Best Poster Award) Sang-Kon Kim, Ilsin An, Hye-Keun Oh, Sun Muk Lee, Cheolkyu Bok, Seung Chan Moon SPIE - The International Society of Optical Engineering	9 国際会議録 An Optimized Process and Characterization of Pb(Zr,Ti)O3 Ferroelectric Capacitor for 1T/1C Ferroelectric RAM Shin, Dong-Won, Shin, Soo-Ho, Lee, Jin-Woo, Park, Hong-Bae, Chun, Yoon-Soo, Lee, Mi-Hyang, Jung, Dong-Jin, Hwang, … MRS - Materials Research Society
4 国際会議録 Rapid and Sensitive Detection of Cardiac Markers in Human Serum Using Surface Acoustic Wave Immunosensor Joonhyung Lee, Youn-Suk Choi, Yeolho Lee, Hun Joo Lee, Jung Nam Lee, Sang Kyu Kim, Kyung Yeon Han, Eun Chol Cho, Jae … Materials Research Society	10 国際会議録 Electrode Effect on Microwave Properties of Ferroelectric (BaxSr1-x)TiO3 Thin Films Kim, Won-Jeong, Kim, Sang-Su, Song, Tae-Kwon, Moon, Seung Eon, Kim, Eun-Kyoung, Kwak, Min-Hwan, Han, Seok-Kil, Kim, … Materials Research Society
5 国際会議録 High-Performance of Poly-Si TFTs With Multiple Selectively Doped Regions in the Active Layer Lee, Min-Cheol, Yoo, Juhn-Suk, Park, Kee-Chan, Jung, Sang-Hoon, Han, Min-Koo, Kim, Hyun-Jae Materials Research Society	11 国際会議録 Bias Stress Stability of Asymmetric Source-Drain a-Si:H Thin Film Transistors Kwang-Sub Shin, Jae-Hoon Lee, Won-kyu Lee, Sang-Geun Park, Min-Koo Han Materials Research Society
6 国際会議録 Effect of a Channel Length and Drain Bias on the Threshold Voltage of Field Enhanced Solid Phase Crystallization Polycrystalline Thin-Film Transistor on the … Won-Kyu Lee, Sang-Myeon Han, Sang-Geun Park, Young-Jin Chang, Kee-Chan Park, Chi-Woo Kim, Min-Koo Han Materials Research Society	12 国際会議録 Photodegradation of a volatile organic compound by fluidized bed reactor with TiO₂/SiO₂ and metal-TiO₂/SiO₂ Sang-Keun Lee, Jung-Sun Kim, Il-Kyu Kim, Jea-Keun Lee Elsevier

1

2

3

4

5

6

7

8

9

10

11

12