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Silicon micromachining and its impact on materials and device properties: plasma etching damage issues

著者名:
掲載資料名:
Smart structures and materials 1995 : Smart electronics : 2-3 March 1995, San Diego, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2448
発行年:
1995
開始ページ:
130
終了ページ:
140
総ページ数:
11
出版情報:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819417978 [0819417971]
言語:
英語
請求記号:
P63600/2448
資料種別:
国際会議録

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