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Phase measurement using a liquid crystal point diffraction interferometer

著者名:
掲載資料名:
Industrial optical sensors for metrology and inspection : 31 October-1 November 1994, Boston, Massachusetts
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2349
発行年:
1995
開始ページ:
95
終了ページ:
99
総ページ数:
5
出版情報:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819416841 [0819416843]
言語:
英語
請求記号:
P63600/2349
資料種別:
国際会議録

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