Characterization of polycrystalline silicon grain boundary structures by optical second harmonic generation
- 著者名:
- 掲載資料名:
- Optical characterization techniques for high-performance microelectronic device manufacturing : 20 October 1994, Austin, Texas
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 2337
- 発行年:
- 1994
- 開始ページ:
- 86
- 終了ページ:
- 92
- 総ページ数:
- 7
- 出版情報:
- Bellingham, WA: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819416704 [0819416703]
- 言語:
- 英語
- 請求記号:
- P63600/2337
- 資料種別:
- 国際会議録
類似資料:
MRS - Materials Research Society |
SPIE - The International Society of Optical Engineering |
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8
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Probing the structure of multilayer molecular adsorbates on metal by second harmonic generation
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