High-quality sub-5-nm oxynitride dielectric films grown on silicon in a nitric oxide ambient using rapid thermal processing
- 著者名:
- 掲載資料名:
- Microelectronics technology and process integration : 20-21 October 1994, Austin, Texas
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 2335
- 発行年:
- 1994
- 開始ページ:
- 265
- 終了ページ:
- 270
- 総ページ数:
- 6
- 出版情報:
- Bellingham, WA: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819416681 [0819416681]
- 言語:
- 英語
- 請求記号:
- P63600/2335
- 資料種別:
- 国際会議録
類似資料:
MRS - Materials Research Society |
Society of Photo-optical Instrumentation Engineers |
Electrochemical Society |
SPIE - The International Society for Optical Engineering |
MRS - Materials Research Society |
9
国際会議録
Novel fiber-to-waveguide coupling method using silicon-on-insulator micromachining techniques
SPIE - The International Society for Optical Engineering |
MRS-Materials Research Society |
Electrochemical Society |
Materials Research Society |
MRS - Materials Research Society |
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Society of Photo-optical Instrumentation Engineers |