(600b) iCVD Top-Coat for Sub-10nm Patterning with Directed Self-Assembly of Block Copolymer Film

(600b) iCVD Top-Coat for Sub-10nm Patterning with Directed Self-Assembly of Block Copolymer Film

著者名:

掲載資料名:

Nanoscale Science and Engineering Forum 2015 : Core Programming Area at the 2015 AIChE Annual Meeting : Salt Lake City, Utah, USA, 8-13 November 2015

シリーズ名:

AIChE Conference Proceedings

シリーズ巻号:

2015

発行年:

2015

開始ページ:

307

終了ページ:

307

総ページ数:

1

出版情報:

New York: American Institute of Chemical Engineers

ISBN:

9781510818668 [1510818669]

言語:

英語

請求記号:

A08000/2015 [CD-ROM]

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00061320
シリーズID:	PA00000008
会議名:	Nanoscale Science and Engineering Forum ; AIChE Annual Meeting
回次:	2015
会議開催地:	Salt Lake City, UT, USA
会議開催年:	2015.11.08-2015.11.13
論文注記:	2015 AIChE Annual Meeting. Nanoscale Science and Engineering Forum, Salt Lake City, Utah, USA, 8-13 November 2015

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