(530b) Hot Wire Assisted Chemical Vapor Deposition (HWCVD) of Niobium Nitride Thin Films

(530b) Hot Wire Assisted Chemical Vapor Deposition (HWCVD) of Niobium Nitride Thin Films

著者名:

掲載資料名:

2011 AIChE annual meeting, October 16-21, Minneapolis Convention Center, Minneapolis, MN : conference proceedings : Non-topical conferences

シリーズ名:

AIChE Conference Proceedings

シリーズ巻号:

P-267

発行年:

2011

パート:

Materials Engineering & Sciences Division

出版情報:

New York: American Institute of Chemical Engineers

ISBN:

9780816910700 [0816910707]

言語:

英語

請求記号:

A08000/2011 [CD-ROM]

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00061222
シリーズID:	PA00000008
会議名:	AIChE annual meeting ; Particle Technology Forum ; North American Mixing Forum ; Computational Molecular Science and Engineering Forum ; Nanoscale Science and Engineering Forum ; Sustainable Engineering Forum ; Chemical Engineering & the Law Forum
回次:	2011
会議開催地:	Minneapolis, MN, USA
会議開催年:	2011.10.16-2011.10.21
論文注記:	[Html document] 2011 AIChE annual meeting, Minneapolis Convention Center, Minneapolis, MN, October 16-21, 2011. Materials Engineering and Sciences Division (Paper238550)

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