609c. ChEmical Mechanical Polishing of Oxide Layers Using Novel Ceria-Polymer Microcomposites

609c. ChEmical Mechanical Polishing of Oxide Layers Using Novel Ceria-Polymer Microcomposites

著者名:

掲載資料名:

AIChE annual meeting, Philadelphia 100 : conference proceedings : 1908 to 2008 : 2008 AIChE annual meeting, Philadelphia, PA, November 16-21, 2008. Non-topical conferences

シリーズ名:

AIChE Conference Proceedings

シリーズ巻号:

P-255

発行年:

2008

パート:

1

開始ページ:

P127234

総ページ数:

5

出版情報:

New York: American Institute of Chemical Engineers

ISBN:

9780816910502 [0816910502]

言語:

英語

請求記号:

A08000/2008 [CD-ROM]

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00061216
シリーズID:	PA00000008
会議名:	AIChE Annual Meeting ; Particle Technology Forum ; North American Mixing Forum ; Computational Molecular Science and Engineering Forum ; Nanoscale Science and Engineering Forum ; Sustainable Engineering Forum
回次:	2008
会議開催地:	Philadelphia, PA, USA
会議開催年:	2008.11.16-2008.11.21
論文注記:	2008 AIChE Annual Meeting. Engineering Sciences and Fundamentals, Philadelphia, PA, November 16-21, 2008

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