Effect of Assisted-Ion-Beam Gases on the Structure of Amorphous Silicon Thin Films Prepared by Ion-Beam-Assisted Sputtering

Effect of Assisted-Ion-Beam Gases on the Structure of Amorphous Silicon Thin Films Prepared by Ion-Beam-Assisted Sputtering

著者名:

掲載資料名:

Functional Materials Research : selected, peer reviewed papers from the China Functional Material Technology and Industry Forum CFMTIF 2015, October 30th - Novemnber 1th, 2015

シリーズ名:

Materials science forum

シリーズ巻号:

852

発行年:

2016

パート:

2

開始ページ:

1102

終了ページ:

1107

総ページ数:

6

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9783038357551 [3038357553]

言語:

英語

請求記号:

M23650 [v.852]

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00055300
シリーズID:	PA00000012
会議名:	China Functional Material Technology and Industry Forum - CFMTIF 2015
回次:	2015
会議開催地:	China
会議開催年:	2015.10.30-2015.11.01
論文注記:	China Functional Material Technology and Industry Forum CFMTIF 2015, October 30th - Novemnber 1th, 2015

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