Structure and Properties of W-Ti Thin Films Deposited by Magnetron Sputtering

Structure and Properties of W-Ti Thin Films Deposited by Magnetron Sputtering

著者名:

掲載資料名:

Special and High Performance Structural Materials : Selected, peer reviewed papers from the Chinese Materials Conference 2015, July 10-14, 2015, Guiyang, China

シリーズ名:

Materials science forum

シリーズ巻号:

849

発行年:

2016

開始ページ:

654

終了ページ:

658

総ページ数:

5

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9783038357612 [3038357618]

言語:

英語

請求記号:

M23650 [v.849]

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00054306
シリーズID:	PA00000012
会議名:	Chinese Materials Conference
回次:	2015
会議開催地:	Guiyang, China
会議開催年:	2015.07.10-2015.07.14
論文注記:	Chinese Materials Conference 2015, July 10-14, 2015, Guiyang, China

類似資料:

1 国際会議録 Structural and Optical Properties of SiC Films Deposited on Si by DC Magnetron Sputtering Lei, Y.M., Yu, Y.H., Cheng, L.L., Lin, L., Sundaraval, B., Luo, E.Z., Lin, S., Ren, C.X., Cheung, W.Y., Wong, S.P., Xu, … Trans Tech Publications	7 国際会議録 Preparation and Influencing Factors of Molybdenum Targets and Magnetron-Sputter-Deposited Molybdenum Thin Films G. An, J. Sun, Y.J. Sun, W.C. Cao Trans Tech Publications
2 国際会議録 Electrical/Optical Properties of Thin Transparent Oxide Films Deposited Using DC Magnetron Sputtering So, B.S., Kim, S.M., Pyo, Y.S., Kim, Y.H., Hwang, J.H. Trans Tech Publications	8 国際会議録 Investigation of Optical Properties of ZnO Films Deposited by RF Magnetron Sputtering S. Li, F.X. Wang, G. Fu, Y.J. Ji, J.Q. Zhao Trans Tech Publications
3 国際会議録 Morphology of Ti37Al63 Thin-Films Deposited by Magnetron Sputtering Theodore, N.David, Kim, Hyunchul C., Gadre, Kaustubh S., Mayer, James W., Alford, Terry L. Materials Research Society	9 国際会議録 Characteristics of SnO2 Thin Films Deposited by RF Magnetron Sputtering Ryu, H.W., Park, Y.J., Noh, H.S., Park, J.S. Trans Tech Publications
4 国際会議録 Structure and Mechanical Properties of AlCrN Thin Films Deposited by Magnetron Sputtering T.T.H. Pham, E. Le Bourhis, P. Goudeau, P. Guérin Trans Tech Publications	10 国際会議録 Thermoelectric properties of bismuth telluride thin films deposited by radio frequency magnetron sputtering Tan, J., Kalantar-zadeh, K., Wlodarski, W., Bhargava, S., Akolekar, D., Holland, A., Rosengarten, G. SPIE - The International Society of Optical Engineering
5 国際会議録 Optical properties of thin films deposited by reactive-Rf-magnetron sputtering Yoshida,K., Kamimura,T., Ochi,K., Kaku,S., Yoshida,H., Fujita,H., Tani,F., Sunagawa,M., Okamoto,T. SPIE-The International Society for Optical Engineering	11 国際会議録 Ferroelectric Properties of Lead-Free (Bi,La)4Ti3O12 Thin Film Deposited on MTP Cell Structure for High Density FeRAM Device Cho, K. W., Kim, N. K., Oh, S. H., Choi, E. S., Sun, H. J., Yeom, S. J., Lee, K. N., Lee, S. S., Hong, S. K., Choi, S. … Trans Tech Publications
6 国際会議録 Structure Stability and Mechanical Property of Y₂O₃ Thin Films Deposited by Reactive Magnetron Sputtering P.F. Yu, K. Zhang, S.X. Du, P. Ren, M. Wen, W.T. Zheng Trans Tech Publications	12 国際会議録 Ti-N-C Films Deposited by Ion Beam Assisted MF Twin Targets Unbalanced Magnetron Sputtering Y. Huang, S.N. Sun, Y.F. Wu, S.G. Ma, Y. Zhou Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12