Thermal Fields Simulation of the Refining Process for Si Wafer by Continuous-Wave Laser Irradiation
- 著者名:
- 掲載資料名:
- Applied Materials and Technologies : Selected, peer reviewed papers from the 9th International Forum on Advanced Material Science and Technology (IFAMST9), November 30 - December 3, 2014, Xiamen, China
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 833
- 発行年:
- 2015
- 開始ページ:
- 117
- 終了ページ:
- 121
- 総ページ数:
- 5
- 出版情報:
- Aedermannsdorf, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9783038355960 [3038355968]
- 言語:
- 英語
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
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9
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