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Thin PSG Process for 4H-SiC MOSFET

著者名:
掲載資料名:
Silicon carbide and related materials 2013 : selected, peer reviewed papers from the 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan
シリーズ名:
Materials science forum
シリーズ巻号:
778-780
発行年:
2014
パート:
1
開始ページ:
513
終了ページ:
516
総ページ数:
4
出版情報:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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