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AFM and Ellipsometry Studies of Ultra Thin Ti Film Deposited on a Silicon Wafer

著者名:
掲載資料名:
Advances in Materials and Processing Technologies XV : Selected, peer reviewed papers from the 15th International Conference on Advances in Materials and Processing Technologies (AMPT 2012), September 23-26, 2012, Wollongong, Australia
シリーズ名:
Materials science forum
シリーズ巻号:
773-774
発行年:
2014
開始ページ:
616
終了ページ:
625
総ページ数:
10
出版情報:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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