Morphology and Residual Stress of Ultrathin Al Films Confined by AlN Layers
- 著者名:
- 掲載資料名:
- Advanced Materials Science and Technology : Selected, peer reviewed papers from the 8th International Forum on Advanced Materials Science and Technology (IFAMST 8) August 1-4, 2012, Fukuoka Institute of Technology, Japan
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 750
- 発行年:
- 2013
- 開始ページ:
- 276
- 終了ページ:
- 279
- 総ページ数:
- 4
- 出版情報:
- Aedermannsdorf, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- 言語:
- 英語
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
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