Morphology and Residual Stress of Ultrathin Al Films Confined by AlN Layers

Morphology and Residual Stress of Ultrathin Al Films Confined by AlN Layers

著者名:

掲載資料名:

Advanced Materials Science and Technology : Selected, peer reviewed papers from the 8th International Forum on Advanced Materials Science and Technology (IFAMST 8) August 1-4, 2012, Fukuoka Institute of Technology, Japan

シリーズ名:

Materials science forum

シリーズ巻号:

750

発行年:

2013

開始ページ:

276

終了ページ:

279

総ページ数:

4

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00054228
シリーズID:	PA00000012
会議名:	International Forum on Advanced Materials Science and Technology (IFAMST 8)
回次:	8th
会議開催地:	Fukuoka, Japan
会議開催年:	2012.08.01-2012.08.04
論文注記:	8th International Forum on Advanced Materials Science and Technology (IFAMST 8) August 1-4, 2012, Fukuoka Institute of Technology, Japan

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