Post-Growth Process Effect on Hetero-Epitaxial 3C-SiC Wafer Bow and Residual Stress

Post-Growth Process Effect on Hetero-Epitaxial 3C-SiC Wafer Bow and Residual Stress

著者名:

掲載資料名:

Silicon carbide and related materials 2012 : selected, peer reviewed papers from the 9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012), September 2-6,2012, St. Petersburg, Russian Federation

シリーズ名:

Materials science forum

シリーズ巻号:

740-742

発行年:

2013

開始ページ:

301

終了ページ:

305

総ページ数:

5

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00054223
シリーズID:	PA00000012
会議名:	European Conference on Silicon Carbide and Related Materials (ECSCRM 2012)
回次:	9th
会議開催地:	St. Petersburg, Russian Federation
会議開催年:	2012.09.02-2012.09.06
論文注記:	9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012), September 2-6,2012, St. Petersburg, Russian Federation

類似資料:

1 国際会議録 Raman Stress Characterization of Hetero-Epitaxial 3C-SiC Free Standing Structures N. Piluso, M. Camarda, R. Anzalone, A. Severino, A. La Magna Trans Tech Publications	7 国際会議録 Residual Stress Measurement on Hetero-Epitaxial 3C-SiC Films R. Anzalone, C. Locke, A. Severino, D. Rodilosso, C. Tringali Trans Tech Publications
2 国際会議録 Stress Evaluation on Hetero-Epitaxial 3C-SiC Film on (100) Si Substrates R. Anzalone, M. Camarda, C. Locke, J. Carballo, N. Piluso Trans Tech Publications	8 国際会議録 Structural Characterization of Heteroepitaxial 3C-SiC A. Severino, R. Anzalone, M. Camarda, N. Piluso, F. La Via Trans Tech Publications
3 国際会議録 Growth Rate Effect on 3C-SiC Film Residual Stress on (100) Si Substrates R. Anzalone, C. Locke, J. Carballo, N. Piluso, A. Severino Trans Tech Publications	9 国際会議録 Complete Determination of the Local Stress Field in Epitaxial Thin Films Using Single Microstructure M. Camarda, R. Anzalone, A. Severino, N. Piluso, A. La Magna Trans Tech Publications
4 国際会議録 Extended Characterization of the Stress Fields in the Heteroepitaxial Growth of 3C-SiC on Silicon for Sensors and Device Applications M. Camarda, R. Anzalone, N. Piluso, A. Severino, A. Canino Trans Tech Publications	10 国際会議録 Raman Characterization of Doped 3C-SiC/Si for Different Silicon Substrates and C/Si Ratios N. Piluso, A. Severino, M. Camarda, R. Anzalone, A. Canino Trans Tech Publications
5 国際会議録 Curvature Evaluation of Si/3C-SiC/Si Hetero-Structure Grown by Chemical Vapor Deposition R. Anzalone, M. Camarda, A. Severino, N. Piluso, F. La Via Trans Tech Publications	11 国際会議録 Analysis on 3C-SiC Layer Grown on Pseudomorphic-Si/Si_1-xGe_x/Si(001) Heterostructures N. Piluso, M. Camarda, R. Anzalone, A. Severino, S. Scalese Trans Tech Publications
6 国際会議録 Mechanical Proprieties and Residual Stress Evaluation on Heteroepitaxial 3C-SiC/Si for MEMS Application R. Anzalone, G. D'Arrigo, M. Camarda, N. Piluso, A. Severino Trans Tech Publications	12 国際会議録 Strain Evaluation and Fracture Properties of Hetero-Epitaxial Single Crystal 3C-SiC Squared Membrane R. Anzalone, G. D'Arrigo, M. Camarda, N. Piluso, F. La Via Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12