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Innovative 3C-SiC on SiC via Direct Wafer Bonding

著者名:
掲載資料名:
Silicon carbide and related materials 2012 : selected, peer reviewed papers from the 9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012), September 2-6,2012, St. Petersburg, Russian Federation
シリーズ名:
Materials science forum
シリーズ巻号:
740-742
発行年:
2013
開始ページ:
271
終了ページ:
274
総ページ数:
4
出版情報:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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