Threading Dislocations in 4H-SiC Observed by Double-Crystal X-Ray Topography

Threading Dislocations in 4H-SiC Observed by Double-Crystal X-Ray Topography

著者名:

掲載資料名:

Defects-recognition, imaging and physics in semiconductors XIV : selected, peer reviewed papers from the 14th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors, September 25-29, 2011, Miyazaki, Japan

シリーズ名:

Materials science forum

シリーズ巻号:

725

発行年:

2012

開始ページ:

7

終了ページ:

10

総ページ数:

4

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00054212
シリーズID:	PA00000012
会議名:	International Conference on Defects-Recognition, Imaging and Physics in Semiconductors
回次:	14th
会議開催地:	Miyazaki, Japan
会議開催年:	2011.09.25-2011.09.29
論文注記:	14th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors, September 25-29, 2011, Miyazaki, Japan

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1 国際会議録 Contrast of Basal Plane and Threading Edge Dislocations in 4H-SiC by X-Ray Topography in Grazing Incidence Geometry H. Matsuhata, H. Yamaguchi, I. Nagai, T. Ohno, R. Kosugi Trans Tech Publications	7 国際会議録 Complex Behavior of Threading Dislocations Observed in PVT-Grown 4H-SiC Single Crystals M. Katsuno, T. Fujimoto, H. Yashiro, H. Tsuge, S. Sato Trans Tech Publications
2 国際会議録 Dislocation Contrast of 4H-SiC in X-Ray Topography under Weak-Beam Condition H. Yamaguchi, H. Matsuhata, I. Nagai Trans Tech Publications	8 国際会議録 Origin Analyses of Obtuse Triangular Defects in 4deg.-Off 4H-SiC Epitaxial Wafers by Electron Microscopy and by Synchrotron X-Ray Topography T. Yamashita, H. Matsuhata, Y. Miyasaka, H. Ohshima, M. Sekine Trans Tech Publications
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4 国際会議録 Observation of Misfit Dislocations Introduced by Epi-Layer Growth on 4H-SiC H. Matsuhata, H. Yamaguchi, I. Nagai, T. Ohno, R. Kosugi Trans Tech Publications	10 国際会議録 Origin Analyses of Trapezoid-Shape Defects in 4-Deg.-off 4H-SiC Epitaxial Wafers by Synchrotron X-Ray Topography T. Yamashita, H. Matsuhata, Y. Miyasaka, K. Momose, T. Sato Trans Tech Publications
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