Blank Cover Image

Detailed Experimental Study of Mean and Gradient Stresses in Thin 3C-SiC Films Performed Using Micromachined Cantilevers

著者名:
掲載資料名:
HeteroSiC & WASMPE 2011 : selected, peer reviewed papers from the 4th Workshop on Advanced Semiconductor Materials and Devices for Power Electronics Applications (HeteroSiC & WASMPE 2011), June 27-30, 2011, Tours, France
シリーズ名:
Materials science forum
シリーズ巻号:
711
発行年:
2012
開始ページ:
84
終了ページ:
88
総ページ数:
5
出版情報:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

類似資料:

1 国際会議録 Micromachining of Thin 3C-SiC Films for Mechanical Properties Investigation

J.F. Michaud, S. Jiao, A.E. Bazin, M. Portail, T. Chassagne, M. Zielinski, D. Alquier

Materials Research Society
7 国際会議録 Thermally Induced Surface Reorganization of 3C-SiC(111) Epilayers Grown on Silicon Substrates

M. Portail, T. Chassagne, S. Roy, C. Moisson, M. Zielinski

Trans Tech Publications
2 国際会議録 Elaboration of Monocrystalline Si Thin Film on 3C-SiC(100)/Si Epilayers by Low Pressure Chemical Vapor Deposition

S. Jiao, M. Portail, J.F. Michaud, M. Zielinski, T. Chassagne

Trans Tech Publications
8 国際会議録 Role of Substrate Misorientation in Relaxation of 3C-SiC Layers on Silicon

M. Zielinski, M. Portail, S. Roy, S. Kret, T. Chassagne

Trans Tech Publications
3 国際会議録 Analytical Model of Stress Relaxation in 3C SiC Layers on Silicon

M. Zielinski, J.F. Michaud, S. Jiao, T. Chassagne, A.E. Bazin

Trans Tech Publications
9 国際会議録 Structural and Morphological Characterization of 3C-SiC Films Grown on (111), (211) and (100) Silicon Substrates

M. Portail, M. Nemoz, M. Zielinski, T. Chassagne

Trans Tech Publications
4 国際会議録 Novel 3C-SiC Microstructure for MEMS Applications

J.F. Michaud, M. Portail, R. Khazaka, M. Zielinski, T. Chassagne

Trans Tech Publications
10 国際会議録 Strain in 3C-SiC Heteroepitaxial Layers Grown on (100) and (111) Oriented Silicon Substrates

M. Zielinski, M. Portail, T. Chassagne, Y. Cordier

Trans Tech Publications
5 国際会議録 3C-SiC: New Interest for MEMS Devices

J.F. Michaud, M. Portail, T. Chassagne, M. Zielinski, D. Alquier

Trans Tech Publications
11 国際会議録 Trends in Dopant Incorporation for 3C-SiC Films on Silicon

M. Zielinski, M. Portail, H. Peyre, T. Chassagne, S. Ndiaye, B. Boyer, A. Leycuras, J. Camassel

Trans Tech Publications
6 国際会議録 Low Specific Contact Resistance to 3C-SiC Grown on (100) Si Substrates

A.E. Bazin, T. Chassagne, J.F. Michaud, A. Leycuras, M. Portail, M. Zielinski, E. Collard, D. Alquier

Trans Tech Publications
12 国際会議録 Advances in Liquid Phase Conversion of (100) and (111) Oriented Si Wafers into Self-Standing 3C-SiC

M. Zielinski, M. Portail, T. Chassagne, S. Juillaguet, H. Peyre

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12