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Caracteristics of TiN Coating Films for Large Sizes Prepared by Arc Ion Plating

著者名:
掲載資料名:
THERMEC 2011 : International Conference on Processing & Manufacturing of Advanced Materials : processing, fabrication, properties, applications, August 1-5, 2011, Quebec City, Canada
シリーズ名:
Materials science forum
シリーズ巻号:
706-709
発行年:
2012
パート:
4
開始ページ:
2589
終了ページ:
2595
総ページ数:
7
出版情報:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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