Effect of Rapid Thermal Annealing Condition on the Structure and Conductivity Properties of Polycrystalline Silicon Films on Glass

Effect of Rapid Thermal Annealing Condition on the Structure and Conductivity Properties of Polycrystalline Silicon Films on Glass

著者名:

掲載資料名:

Functional and electronic materials : selected, peer reviewed papers from IUMRS-ICA 2010, 11th IUMRS International Conference in Asia, 25-28 September 2010, Qingdao, China

シリーズ名:

Materials science forum

シリーズ巻号:

687

発行年:

2011

開始ページ:

634

終了ページ:

640

総ページ数:

7

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00054184
シリーズID:	PA00000012
会議名:	IUMRS International Conference in Asia (IUMRS-ICA 2010)
回次:	11th
会議開催地:	Qingdao, China
会議開催年:	2010.09.25-2010.09.28
論文注記:	11th IUMRS International Conference in Asia (IUMRS-ICA 2010), 25-28 September 2010, Qingdao, China

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