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Characterisation of HfO2/Si/SiC MOS Capacitors

著者名:
掲載資料名:
Silicon Carbide and Related Materials 2010 : Selected, peer reviewed papers from the 8th European Conference on Silicon Carbide and Related Materials (ECSCRM 2010), held in Oslo (Sundvolden Conference Centre), Norway, August 29th - September 2nd
シリーズ名:
Materials science forum
シリーズ巻号:
679-680
発行年:
2011
開始ページ:
674
終了ページ:
677
総ページ数:
4
出版情報:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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