Quality Control and Electrical Properties of Thin Amorphous (SiC)1-x(AlN)x Films Produced by Radio Frequency Dual Magnetron Sputtering

Quality Control and Electrical Properties of Thin Amorphous (SiC)_1-x(AlN)_x Films Produced by Radio Frequency Dual Magnetron Sputtering

著者名:

掲載資料名:

Silicon carbide and related materials 2009 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2009, Nurnberg, Germany, October 11-16, 2009

シリーズ名:

Materials science forum

シリーズ巻号:

645-648

発行年:

2010

パート:

2

開始ページ:

1199

終了ページ:

1202

総ページ数:

4

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00054155
シリーズID:	PA00000012
会議名:	International Conference on Silicon Carbide and Related Materials
回次:	2009
会議開催地:	Nurnberg, Germany
会議開催年:	2009.10.11-2009.10.16
論文注記:	International Conference on Silicon Carbide and Related Materials 2009, Nurnberg, Germany, October 11-16, 2009

類似資料:

1 国際会議録 Determination of the Optical Bandgap of Thin Amorphous (SiC)_1-x(AlN)_x Films J.A. Guerra, A. Winterstein, O. Erlenbach, G. Gálvez, F. De Zela Trans Tech Publications	7 国際会議録 High Quality AlN Thin Films Deposited by Middle-Frequency Magnetron Sputtering at Room Temperature C. Li, L. Shu, L.J. He, X.Z. Liu Trans Tech Publications
2 国際会議録 Thermal Activation and Cathodoluminescence Measurements of Tb³⁺-Doped α-(SiC)_1-x(AlN)_x Thin Films O. Erlenbach, G. Gálvez, J.A. Guerra, F. De Zela, R. Weingärtner Trans Tech Publications	8 国際会議録 CdS and CdTe Large Area Thin Films Processed by Radio-Frequency Planar-Magnetron Sputtering Hernandez-Contreras, H., Contreras-Puente, G., Aguilar-Hernandez, J., Morales-Acevedo, A., Vidal-Larramendi, J., … Materials Research Society
3 国際会議録 Effects of the Thermal Annealing with CdCl₂ on the Optical Properties of CdS Thin Films Grown by Radio-Frequency Planar Magnetron Sputtering M.R. Espinosa-Rosas, J.R. Aguilar-Hernández, H. Hernández-Contreras, M.A. Hernández-Pérez, G.S. Contreras-Puente Trans Tech Publications	9 国際会議録 Influence of Substrate on Structure and Magnetic Properties of Bi_0.9Nd_0.1FeO₃Thin Films by Radio Frequency Magnetron … Li, L.L., Liu, Qiu Xiang, Zou, Yan, Tang, Xin Gui, Jiang, Yan Ping Trans Tech Publications
4 国際会議録 Growth of Epitaxial (SiC)x(AlN)1-x Thin Films on 6H-SiC by Ion-Assisted Dual Magnetron Sputter Deposition Tungasmita, S., Persson, P.O.A., Seppaenen, T., Hultman, L., Birch, J. Trans Tech Publications	10 国際会議録 Structural and Electrical Properties of Mg-Si Thin Films Fabricated by Radio-Frequency Magnetron Sputtering Deposition Jun-ichi Tani, Hiroyasu Kido Materials Research Society
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6 国際会議録 Effect of Post-Annealing Treatment on the Structure and Luminescence Properties of AIN:Tb³⁺ Thin Films Prepared by Radio Frequency Magnetron … K.Y. Tucto Salinas, L.F. Flores Escalante, J.A. Guerra Torres, R. Grieseler, T. Kups, J. Pezoldt, A. Osvet, M. … Trans Tech Publications	12 国際会議録 Effects of gamma-ray irradiation on the microstructural and luminescent properties of radio-frequency magnetron-sputtered GaN thin films Wang,C.-W., Soong,B.-S., Tzeng,C.-T., Chen,J.-Y., Chen,C.-L. SPIE - The International Society for Optical Engineering

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