Spectroscopic Measurement of Electric Discharge Machining for Silicon Carbide

Spectroscopic Measurement of Electric Discharge Machining for Silicon Carbide

著者名:

掲載資料名:

Silicon carbide and related materials 2008 : selected peer reviewed papers from the 7th European Conference on Silicon Carbide and Related Materials, September 7-11 Barcelona, Spain

シリーズ名:

Materials science forum

シリーズ巻号:

615-617

発行年:

2009

開始ページ:

609

終了ページ:

612

総ページ数:

4

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00054140
シリーズID:	PA00000012
会議名:	European Conference on Silicon Carbide and Related Materials
回次:	7th
会議開催地:	Barcelona, Spain
会議開催年:	2008.09.07-2008.09.11
論文注記:	7th European Conference on Silicon Carbide and Related Materials, September 7-11 Barcelona, Spain

類似資料:

1 国際会議録 Electric Discharge Machining for Silicon Carbide in Gases of Ar, Ar-CH₄ and Ar-CF₄ Mixtures T. Sugimoto, T. Noro, S. Yamaguchi, H. Majima, T. Kato Trans Tech Publications	7 国際会議録 Temperature Dependence of Plasma Chemical Vaporization Machining of Silicon and Silicon Carbide Y. Sano, M. Watanabe, T. Kato, K. Yamamura, H. Mimura Trans Tech Publications
2 国際会議録 Electric Discharge Machining for Silicon Carbide and Related Materials S. Yamaguchi, T. Noro, H. Takahashi, H. Majima, Y. Nagao Trans Tech Publications	8 国際会議録 Development of Multi-Wire Electric Discharge Machining for SiC Wafer Processing M. Ogawa, K. Mine, S. Fuchiyama, Y. Tawa, T. Kato Trans Tech Publications
3 国際会議録 Characterization of Electric Discharge Machining for Silicon Carbide Single Crystal T. Kato, T. Noro, H. Takahashi, S. Yamaguchi, K. Arai Trans Tech Publications	9 国際会議録 Beveling of Silicon Carbide Wafer by Plasma Chemical Vaporization Machining T. Kato, Y. Sano, H. Hara, H. Mimura, K. Yamamura Trans Tech Publications
4 国際会議録 Cutting Speed of Electric Discharge Machining for SiC Ingot H. Yamada, S. Yamaguchi, N. Yamamoto, T. Kato Trans Tech Publications	10 国際会議録 SiC Single Crystal Growth Rate Measurement by in-Situ Observation using the Transmission X-Ray Technique Oyanagi, N., Nishizawa, S., Kato, T., Yamaguchi, H., Arai, K. Trans Tech Publications
5 国際会議録 Slicing of Rotating SiC Ingot by Electric Discharge Machining N. Yamamoto, S. Yamaguchi, T. Kato Trans Tech Publications	11 国際会議録 A Method to Adjust Polycrystalline Silicon Carbide Etching Rate Profile by Chlorine Trifluoride Gas K. Nakagomi, S. Okuyama, H. Habuka, Y. Takahashi, T. Kato Trans Tech Publications
6 国際会議録 Effects of Machining Fluid on Electric Discharge Machining of SiC Ingot N. Yamamoto, S. Yamaguchi, T. Kato Trans Tech Publications	12 国際会議録 From speculation to specification: a discussion on how to define the tolerance of LER/LWR and its measurement methodology [6152-192] Yamaguchi, A., Steffen, R., Kawada, H., Iizumi, T., Sugimoto, A. SPIE - The International Society of Optical Engineering

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