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A Comprehensive Study of Hydrogen Etching on the Major SiC Polytypes and Crystal Orientations

著者名:
掲載資料名:
Silicon carbide and related materials 2008 : selected peer reviewed papers from the 7th European Conference on Silicon Carbide and Related Materials, September 7-11 Barcelona, Spain
シリーズ名:
Materials science forum
シリーズ巻号:
615-617
発行年:
2009
開始ページ:
589
終了ページ:
592
総ページ数:
4
出版情報:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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