Two-Branch Boron Diffusion from Gas Phase in n-Type 4H-SiC

Two-Branch Boron Diffusion from Gas Phase in n-Type 4H-SiC

著者名:

掲載資料名:

Silicon carbide and related materials 2008 : selected peer reviewed papers from the 7th European Conference on Silicon Carbide and Related Materials, September 7-11 Barcelona, Spain

シリーズ名:

Materials science forum

シリーズ巻号:

615-617

発行年:

2009

開始ページ:

453

終了ページ:

456

総ページ数:

4

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00054140
シリーズID:	PA00000012
会議名:	European Conference on Silicon Carbide and Related Materials
回次:	7th
会議開催地:	Barcelona, Spain
会議開催年:	2008.09.07-2008.09.11
論文注記:	7th European Conference on Silicon Carbide and Related Materials, September 7-11 Barcelona, Spain

類似資料:

1 国際会議録 Inverted Pyramid Defects in 4H-SiC Epilayers A. Shrivastava, P.G. Muzykov, T.S. Sudarshan Trans Tech Publications	7 国際会議録 Aluminum and Boron Diffusion into (1-100) Face SiC Substrates Soloviev, S.I., Gao, Y., Khlebnikov, Y., Khlebnikov, I.I., Sudarshan, T.S. Trans Tech Publications
2 国際会議録 Investigation of Triangular Defects in 4H-SiC 4° Off Cut (0001) Si Face Epilayers Grown by CVD A. Shrivastava, P.G. Muzykov, B. Pearman, S.M. Angel, T.S. Sudarshan Trans Tech Publications	8 国際会議録 A Study of Inhomogeneous Schottky Diodcs on n-Type 4H-SiC Ewing, D.J., Wahab, Q., Tumakha, S.P., Brillson, L.J., Ma, X.Y., Sudarshan, T.S., Porter, L.M. Trans Tech Publications
3 国際会議録 Selective Doping of 4H-SiC by Aluminum/Boron Co-Diffusion Gao, Ying, Soloviev, S.I., Wang, X., Tin, C.C., Sudarshan, T.S. Materials Research Society	9 国際会議録 Growth of Low Basal Plane Dislocation Density SiC Epitaxial Layers Zhang, Z.H., Sudarshan, T.S. Trans Tech Publications
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6 国際会議録 Simulations of 10 kV Trench Gate IGBTs on 4H-SiC Zhang, Q.C., Ryu, S.H., Jonas, C., Agarwal, A.K., Palmour, J.W. Trans Tech Publications	12 国際会議録 Characterization of Defects Generated During Boron Diffusion in SiC Lin, Xue-feng, Smith, Stephen P., Ma, Xianyun, Wang, Liang, Sudarshan, Tangali S., Zhang, Qingchun, Chang, Hsueh-Rong Materials Research Society

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