Deep Levels Generated by Ion-Implantation in n- and p-Type 4H-SiC

Deep Levels Generated by Ion-Implantation in n- and p-Type 4H-SiC

著者名:

掲載資料名:

Silicon carbide and related materials 2008 : selected peer reviewed papers from the 7th European Conference on Silicon Carbide and Related Materials, September 7-11 Barcelona, Spain

シリーズ名:

Materials science forum

シリーズ巻号:

615-617

発行年:

2009

開始ページ:

365

終了ページ:

368

総ページ数:

4

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00054140
シリーズID:	PA00000012
会議名:	European Conference on Silicon Carbide and Related Materials
回次:	7th
会議開催地:	Barcelona, Spain
会議開催年:	2008.09.07-2008.09.11
論文注記:	7th European Conference on Silicon Carbide and Related Materials, September 7-11 Barcelona, Spain

類似資料:

1 国際会議録 Effects of Thermal Oxidation on Deep Levels Generated by Ion Implantation into n-Type and p-Type 4H-SiC K. Kawahara, G. Alfieri, T. Hiyoshi, G. Pensl, T. Kimoto Trans Tech Publications	7 国際会議録 Minority Carrier Transient Spectroscopy of As-Grown, Electron Irradiated and Thermally Oxidized p-Type 4H-SiC G. Alfieri, T. Kimoto Trans Tech Publications
2 国際会議録 Reactive-Ion-Etching Induced Deep Levels Observed in n-Type and p-Type 4H-SiC K. Kawahara, G. Alfieri, M. Krieger, T. Kimoto Trans Tech Publications	8 国際会議録 Shallow and Deep Levels in Al+-Implanted p-Type 4H-SiC Measured by Thermal Admittance Spectroscopy K. Kawahara, H. Watanabe, N. Miura, S. Nakata, S. Yamakawa Trans Tech Publications
3 国際会議録 Isochronal Annealing Study of Deep Levels in Hydrogen Implanted p-Type 4H-SiC G. Alfieri, T. Kimoto Trans Tech Publications	9 国際会議録 Deep Levels in Electron-Irradiated n- and p-type 4H-SiC Investigated by Deep Level Transient Spectroscopy K. Danno, T. Kimoto Trans Tech Publications
4 国際会議録 Deep Levels Observed in High-Purity Semi-Insulating 4H-SiC G. Alfieri, T. Kimoto, G. Pensl Trans Tech Publications	10 国際会議録 Deep Level Investigation of pn-Junctions formed by MeV Aluminum and Boron Implantation into 4H-SiC Schoener, A., Miyamoto, N., Kimoto, T., Matsunami, H. Trans Tech Publications
5 国際会議録 Capacitance Spectroscopy Study of Midgap Levels in n-Type SiC Polytypes G. Alfieri, T. Kimoto Trans Tech Publications	11 国際会議録 High Temperature Deep Level Transient Spectroscopy Investigations of n-Type 4H-SiC Epitaxial Layers Schoner, A., Fujihira, K., Kimoto, T., Matsunami, H. Trans Tech Publications
6 国際会議録 Search for Hydrogen Related Defects in p-Type 6H and 4H-SiC G. Alfieri, T. Kimoto Trans Tech Publications	12 国際会議録 Laplace Transform Deep Level Transient Spectroscopy Study of the EH_6/7 Center G. Alfieri, T. Kimoto Trans Tech Publications

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