Space Resolved Optical Emission Spectroscopy during Deposition of BaxSr1-xTiO3 Thin Films by Double Hollow Cathode Plasma Jet System

Space Resolved Optical Emission Spectroscopy during Deposition of Ba_xSr_1-xTiO₃ Thin Films by Double Hollow Cathode Plasma Jet System

著者名:

掲載資料名:

Thin films and porous materials : selected, peer reviewed papers from the First International Conference on Thin Films and Porous Materials, - ICTFPM'08, organized in Algiers on May 19 to 22, 2008

シリーズ名:

Materials science forum

シリーズ巻号:

609

発行年:

2009

開始ページ:

105

終了ページ:

110

総ページ数:

6

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00054137
シリーズID:	PA00000012
会議名:	International Conference on Thin Films and Porous Materials : ICTFPM'08
回次:	1st
会議開催地:	Algiers, Algeria
会議開催年:	2008.05.19-2008.05.22
論文注記:	First International Conference on Thin Films and Porous Materials, - ICTFPM'08, organized in Algiers on May 19 to 22, 2008

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