Novel Use of Columnar Porous Silicon Carbide Structures as Nanoimprint Lithography Stamps

Novel Use of Columnar Porous Silicon Carbide Structures as Nanoimprint Lithography Stamps

著者名:

掲載資料名:

Silicon carbide and related materials 2007 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2007, Otsu Prince Hotel Covention Hall, Lake Biwa Resort, Otsu, Japan, October 14-19, 2007

シリーズ名:

Materials science forum

シリーズ巻号:

600-603

発行年:

2009

パート:

2

開始ページ:

871

終了ページ:

874

総ページ数:

4

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00054132
シリーズID:	PA00000012
会議名:	International Conference on Silicon Carbide and Related Materials
回次:	2007
会議開催地:	Otsu, Japan
会議開催年:	2007.10.14-2007.10.19
論文注記:	International Conference on Silicon Carbide and Related Materials 2007, Otsu Prince Hotel Covention Hall, Lake Biwa Resort, Otsu, Japan, October 14-19, 2007

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1 国際会議録 Columnar Morphology of Porous Silicon Carbide as a Protein-Permeable Membrane for Biosensors and Other Applications Rosenbloom, A.J., Nie, S., Ke, Y., Devaty, R.P., Choyke, W.J. Trans Tech Publications	7 国際会議録 Porosity Dependence of the Velocity of Surface and Bulk Acoustic Waves in Porous Silicon Carbide Films C.K. Young, G.T. Andrews, M.J. Clouter, Y. Ke, W.J. Choyke, R.P. Devaty Trans Tech Publications
2 国際会議録 Porous Structure of Anodized p-Type 6H SiC Shishkin, Y., Ke, Y., Devaty, R.P., Choyke, W.J. Trans Tech Publications	8 国際会議録 CVD Epitaxial Growth of 4H-SiC on Porous SiC Substrates Shishkin, Y., Ke, Y., Yan, F., Devaty, R.P., Choyke, W.J., Saddow, S.E. Trans Tech Publications
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5 国際会議録 Elastic Waves in Nano-Columnar Porous 4H-SiC Measured by Brillouin Scattering R.P. Devaty, M.J. Clouter, Y. Ke, W.J. Choyke Trans Tech Publications	11 国際会議録 Microscopic Structure and Electrical Activity of 4H-SiC/SiO2 Interface Defects : an EPR Study of Oxidized Porous SiC von Bardeleben, H.J., Cantin, J.L., Shishkin, Y., Devaty, R.P., Choyke, W.J. Trans Tech Publications
6 国際会議録 Columnar Pore Growth in n-Type 6H SiC Ke, Y., Yan, F., Devaty, R.P., Choyke, W.J. Trans Tech Publications	12 国際会議録 Raman Spectra of a 4H-SiC Epitaxial Layer on Porous and Non-Porous 4H-SiC Substrates M.J. Clouter, Y. Ke, R.P. Devaty, W.J. Choyke, Y. Shishkin, S.E. Saddow Trans Tech Publications

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