A Silicon Carbide Accelerometer for Extreme Environment Applications

A Silicon Carbide Accelerometer for Extreme Environment Applications

著者名:

掲載資料名:

Silicon carbide and related materials 2007 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2007, Otsu Prince Hotel Covention Hall, Lake Biwa Resort, Otsu, Japan, October 14-19, 2007

シリーズ名:

Materials science forum

シリーズ巻号:

600-603

発行年:

2009

パート:

2

開始ページ:

859

終了ページ:

862

総ページ数:

4

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00054132
シリーズID:	PA00000012
会議名:	International Conference on Silicon Carbide and Related Materials
回次:	2007
会議開催地:	Otsu, Japan
会議開催年:	2007.10.14-2007.10.19
論文注記:	International Conference on Silicon Carbide and Related Materials 2007, Otsu Prince Hotel Covention Hall, Lake Biwa Resort, Otsu, Japan, October 14-19, 2007

類似資料:

1 国際会議録 Mechanical Testing of Flexible Silicon Carbide Interconnect Ribbons Panday, R., Fu, X.A., Rajgopal, S., Lisby, T, Nikles, S.A., Najafi, K., Mehregany, M. Trans Tech Publications	7 国際会議録 Advanced Processing Techniques for Silicon Carbide MEMS and NEMS Zorman, C.A., Mehregany, M. Trans Tech Publications
2 国際会議録 Characterization of Poly-SiC Pressure Sensors for High Temperature and High Pressure Applications S. Jin, S. Rajgopal, M. Mehregany Trans Tech Publications	8 国際会議録 654a. Silicon Carbide Micro/Nano Systems for Extreme Environment Applications Roya Maboudian, C. Carraro American Institute of Chemical Engineers
3 国際会議録 Characterization of Polycrystalline SiC Thin Films for MEMS Applications using Surface Micromachined Devices Dunning, J., Fu, X.A., Rajgopal, S., Mehregany, M., Zorman, C.A. Trans Tech Publications	9 国際会議録 XRD and XTEM Investigation of Polycrystalline Silicon Carbide on Polycrystalline Silicon Roy, S., Zorman, C. A., Wu, C. H., Fleischman, A. J., Mehregany, M. MRS - Materials Research Society
4 国際会議録 Integrated process for smart microstructures Pan,T., Melzak,J.M., Garverick,S., Mehregany,M. SPIE-The International Society for Optical Engineering	10 国際会議録 Silicon and Diamond for MEMS Bearing Applications In Extreme Environments Gardos, M.N. Electrochemical Society
5 国際会議録 Fully-Integrated 6H-SiC JFET Amplifiers for High-Temperature Sensing A. Patil, X.A. Fu, M. Mehregany, S. Garverick Trans Tech Publications	11 国際会議録 Development of a Multilayer SiC Surface Micromachining Process with Capabilities and Design Rules Comparable to Conventional Polysilicon Surface Micromachining Song, X., Rajgopal, S., Melzak, J.M., Zorman, C.A., Mehregany, M. Trans Tech Publications
6 国際会議録 Silicon carbide micro- and nanoelectromechanical systems Mehregany, M., Zorman, C.A. SPIE - The International Society of Optical Engineering	12 国際会議録 Development of a Multilayer SiC Surface Micromachining Process with Capabilities and Design Rules Comparable to Conventional Polysilicon Surface Micromachining Song, X., Rajgopal, S., Melzak, J.M., Zorman, C.A., Mehregany, M. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12