The Fabrication of 2-D Global Fiducial Grid with High Resolution for Spatial Phase Locked e-Beam Lithography

The Fabrication of 2-D Global Fiducial Grid with High Resolution for Spatial Phase Locked e-Beam Lithography

著者名:

掲載資料名:

Physical and numerical simulation of materials processing : selected peer reviewed papers from the 5th International Conference on Physical and Numerical Simulation of Materials Processing, October 23-27, 2007, held in Zhengzhou, China

シリーズ名:

Materials science forum

シリーズ巻号:

575-578

発行年:

2008

パート:

2

開始ページ:

1252

終了ページ:

1257

総ページ数:

6

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00054120
シリーズID:	PA00000012
会議名:	International Conference on Physical and Numerical Simulation of Materials Processing
回次:	5th
会議開催地:	Zhengzhou, China
会議開催年:	2007.10.23-2007.10.27
論文注記:	5th International Conference on Physical and Numerical Simulation of Materials Processing, October 23-27, 2007, held in Zhengzhou, China

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