Fast Diffusion in Germanium and Silicon Investigated by Lamp-Based Rapid Thermal Annealing
- 著者名:
- 掲載資料名:
- Rapid thermal processing and beyond : applications in semiconductor processing : special topic volume : selected papers from RTP specialists all over the world, Dornstadt, Germany
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 573-574
- 発行年:
- 2008
- 開始ページ:
- 35
- 終了ページ:
- 44
- 総ページ数:
- 10
- 出版情報:
- Aedermannsdorf, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- 言語:
- 英語
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
類似資料:
MRS - Materials Research Society |
Materials Research Society |
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Trans Tech Publications |
Trans Tech Publications |
Trans Tech Publications |
4
国際会議録
Simulation of Rapid Thermal Annealed Boron Ultrashallow Junctions in Inert and Oxidizing Ambient
MRS - Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
Electrochemical Society |
MRS - Materials Research Society |
Electrochemical Society |