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Thermal analysis of hot plate resist baking using a lumped capacitance model

著者名:
Bo Zhou  
掲載資料名:
Metrology, inspection, and process control for microlithography XIII : 15-18 March, 1999, Santa Clara, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3677
発行年:
1999
巻:
2
開始ページ:
754
終了ページ:
763
総ページ数:
10
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819431516 [0819431516]
言語:
英語
請求記号:
P63600/3677
資料種別:
国際会議録

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