Scatterometry for post-etch polysilicon gate metrology
- 著者名:
- 掲載資料名:
- Metrology, inspection, and process control for microlithography XIII : 15-18 March, 1999, Santa Clara, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3677
- 発行年:
- 1999
- 巻:
- 1
- 開始ページ:
- 148
- 終了ページ:
- 158
- 総ページ数:
- 11
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819431516 [0819431516]
- 言語:
- 英語
- 請求記号:
- P63600/3677
- 資料種別:
- 国際会議録
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Integrated sc:atterometry in high-volume manufacturing for polysilicon gate etch control [6152-15]
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