Blank Cover Image

Novel Non-Oxidative Aqueous Cleaning Solutions for Tungsten Layers

著者名:
掲載資料名:
Dielectrics for nanosystems 3: materials science, processing, reliability, and manufacturing
シリーズ名:
ECS transactions
シリーズ巻号:
13(2)
発行年:
2008
開始ページ:
331
終了ページ:
340
総ページ数:
10
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566776271 [1566776279]
言語:
英語
請求記号:
E23400/13-2
資料種別:
国際会議録

類似資料:

1 国際会議録 Solution-processed titanium oxide electron injection/transport functional layer in polymer light-emitting diodes [6333-60]

Kim, S. H., Kim, J. Y., Park, S. H., Lee, K.

SPIE - The International Society of Optical Engineering
7 国際会議録 Removal of Cu++ Ions from Aqueous Cu-EDTA Solution Using ZnO Nanopowder

Lee, J. H., Kim, B. S., Lee, J. C., Park, S.

Trans Tech Publications
2 国際会議録 New architectures for high performance polymer light-emitting diodes introducing a solution-processed titanium oxide layer

S. H. Kim, J. Y. Kim, S. H. Park, K. Lee

SPIE - The International Society of Optical Engineering
8 国際会議録 Significant improvement of an AlGaAs-GaAS NpnP optical thyristor with mirror layers

Kim,D.-G., Lee,J.J., Choi,Y.-W., Lee,S., Woo,D.H., Kang,B.K., Kim,H.J., Choi,W.J., Park,Y.H., Yi,H.T., Kim,S.H.

SPIE - The International Society for Optical Engineering
3 国際会議録 Novel single-layer photoresist containing cycloolefins for 193 nm

Park,J.-H., Seo,D.-C., Kim,K.-D., Park,S.-Y., Kim,S.-J., Lee,H., Jung,J.-C., Bok,C.-K., Baik,K.-H.

SPIE-The International Society for Optical Engineering
9 国際会議録 NEW APPROACH FOR STUDY OF PARTICLE ADHESION AND REMOVAL RELEVANT TO POST CMP CLEANING

Lee, S.-Y., Lee, S.-H., Eom, D.-H., Kim, K.-S., Song, H.-S., Park, J.-G.

Electrochemical Society
4 国際会議録 Novel antireflective structure for metal layer patterning

Choi,S.-S., Cha,H.S., Kim,J.-S., Park,J.M., Kim,D.H., Lee,K.H., Ahn,J., Chung,H.B., Kim,B.W.

SPIE-The International Society for Optical Engineering
10 国際会議録 THE EFFECTS OF pH ADJUSTORS IN POST Cu CMP CLEANING SOLUTIONS ON PARTICLE ADHESION AND REMOVAL

Y.-K. Hong, J.-H. Song, Y.-J. Kang, I.-K. Kim, J.-G. Park, H.-S. Song, K.-S. Kim, J.-J. Myung, H.-J. Lee, S.-Y. Song

Electrochemical Society
5 国際会議録 Device performance enhancement in polymer light-emitting diodes by introducing titanium oxide layer [5937-46]

Kim, S. H., Kim, J. Y., Park, S. H., Lee, K.

SPIE - The International Society of Optical Engineering
11 国際会議録 Effect of Additives in Post Cu CMP Cleaning Solutions on Particle Adhesion and Removal

Hong, Y.K., Eom, D.H., Lee, S.H., Park, J.G., Busnaina, A.A.

Electrochemical Society
6 国際会議録 Novel cleaning techniques to achieve defect-free photomasks for sub-65-nm nodes [6349-109]

Ryu, J. H., Lee, D. W., Ryu, J. S., Kim, S. P., Han, O.

SPIE - The International Society of Optical Engineering
12 国際会議録 Fabrication of Oxide/Semiconducting Coaxial Nanotubular Materials Using Atomic Layer Deposition

Jeong, D.K., Park, N.H., Jung, S.H., Jung, W.G., Shin, H., Lee, J.G., Kim, J.Y.

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12