Organic Peracid Etches: A New Class of Chromium Free Etch Solutions for the Delineation of Defects in Different Semiconducting Materials

Organic Peracid Etches: A New Class of Chromium Free Etch Solutions for the Delineation of Defects in Different Semiconducting Materials

著者名:

掲載資料名:

Analytical Techniques for Semiconductor Materials and Process Characterization 5 (ALTECH 2007) (plus Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes)

シリーズ名:

ECS transactions

シリーズ巻号:

10(1)

発行年:

2007

開始ページ:

21

終了ページ:

31

総ページ数:

11

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

19385862

ISBN:

9781604238259 [1604238259]

言語:

英語

請求記号:

E23400/10-1

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013288
シリーズID:	PA00000034
会議名:	Analytical Techniques for Semiconductor Materials and Process Characterization - ALTECH
回次:	2007
会議開催地:	Munich, Germany
会議開催年:	2007.09.13-2007.09.14
論文注記:	Analytical Techniques for Semiconductor Materials and Process Characterization 5 (ALTECH 2007), September 13 - September 14, 2007, Munich, Germany

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