Reliability of High Performance Short Channel Polycrystalline Silicon Thin Film Transistor on the Glass Substrate

Reliability of High Performance Short Channel Polycrystalline Silicon Thin Film Transistor on the Glass Substrate

著者名:

掲載資料名:

2007 International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors (ULSIC vs. TFT)

シリーズ名:

ECS transactions

シリーズ巻号:

8(1)

発行年:

2007

開始ページ:

249

終了ページ:

254

総ページ数:

6

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

19385862

ISBN:

9781604238921 [1604238925]

言語:

英語

請求記号:

E23400/8-1

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013287
シリーズID:	PA00000034
会議名:	International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors
回次:	2007
会議開催地:	Barga, Italy
会議開催年:	2007.07.28-2007.08.03
論文注記:	2007 International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors (ULSIC vs. TFT), July 28 - August 3, 2007, Barga, Italy

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