Investigation of Hump Degradation by F-N stress for Narrow Width n-MOSFETs with Shallow Trench Isolation (STI)
- 著者名:
- 掲載資料名:
- 2007 International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors (ULSIC vs. TFT)
- シリーズ名:
- ECS transactions
- シリーズ巻号:
- 8(1)
- 発行年:
- 2007
- 開始ページ:
- 71
- 終了ページ:
- 75
- 総ページ数:
- 5
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781604238921 [1604238925]
- 言語:
- 英語
- 請求記号:
- E23400/8-1
- 資料種別:
- 国際会議録
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