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Electroless Copper Deposition on Ruthenium for Damascene Interconnects

著者名:
掲載資料名:
Electrochemical Processing in ULSI and MEMS 3
シリーズ名:
ECS transactions
シリーズ巻号:
6(8)
発行年:
2007
開始ページ:
179
終了ページ:
184
総ページ数:
6
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781604238846 [1604238844]
言語:
英語
請求記号:
E23400/6-5 [8]
資料種別:
国際会議録

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