Tuning the Removal Rate of Carbon Doped Oxide during Chemical Mechanical Polishing

Tuning the Removal Rate of Carbon Doped Oxide during Chemical Mechanical Polishing

著者名:

掲載資料名:

Chemical Mechanical Polishing 8

シリーズ名:

ECS transactions

シリーズ巻号:

3(41)

発行年:

2007

開始ページ:

73

終了ページ:

79

総ページ数:

7

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

19385862

ISBN:

9781605601687 [1605601683]

言語:

英語

請求記号:

E23400/3-39 [41]

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00046573
シリーズID:	PA00000034
会議名:	ECS Meeting
回次:	210th
会議開催地:	Cancun, Mexico
会議開催年:	2006.10.29-2006.11.03
論文注記:	210th ECS Meeting, October 29-November 3, 2006, Cancun, Mexico

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