Reactive Ion Etching of Y2O3 Films Applying F-, Cl- and Cl/Br-Based Inductively Coupled Plasmas
- 著者名:
- 掲載資料名:
- Science and Technology of Dielectrics for Active and Passive Photonic Devices
- シリーズ名:
- ECS transactions
- シリーズ巻号:
- 3(11)
- 発行年:
- 2006
- 開始ページ:
- 117
- 終了ページ:
- 124
- 総ページ数:
- 8
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781566775151 [1566775159]
- 言語:
- 英語
- 請求記号:
- E23400/3-11 [11]
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society | |
SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
Society of Photo-optical Instrumentation Engineers |
MRS - Materials Research Society |
Electrochemical Society |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
MRS - Materials Research Society |
Society of Photo-optical Instrumentation Engineers |
MRS - Materials Research Society |