Non-linear Surface Reaction Kinetics of GaAs MOVPE Explored by Selective Area Growth
- 著者名:
- 掲載資料名:
- Fundamental Gas-Phase and Surface Chemistry of Vapor-Phase Materials Processing 3
- シリーズ名:
- ECS transactions
- シリーズ巻号:
- 2(7)
- 発行年:
- 2007
- 開始ページ:
- 145
- 終了ページ:
- 156
- 総ページ数:
- 12
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781566775182 [1566775183]
- 言語:
- 英語
- 請求記号:
- E23400/2-7 [7]
- 資料種別:
- 国際会議録
類似資料:
SPIE - The International Society of Optical Engineering | |
Electrochemical Society |
8
国際会議録
Simplified Modeling of ECR-RIBE Reactor for the Optimization of GaAs Etching Process with C12
Electrochemical Society |
Electrochemical Society |
MRS - Materials Research Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Materials Research Society |
Electrochemical Society |