Numerical and Experimental Investigation of Wet Chemical Etching of Silicon Wafers

Numerical and Experimental Investigation of Wet Chemical Etching of Silicon Wafers

著者名:

掲載資料名:

Electrochemical Processing in ULSI and MEMS 2

シリーズ名:

ECS transactions

シリーズ巻号:

2(6)

発行年:

2007

開始ページ:

295

終了ページ:

303

総ページ数:

9

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

19385862

ISBN:

9781566775175 [1566775175]

言語:

英語

請求記号:

E23400/2-6

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00046579
シリーズID:	PA00000034
会議名:	ECS Meeting
回次:	209th
会議開催地:	Denver, Colorado, USA
会議開催年:	2006.05.07-2006.05.12
論文注記:	209th ECS Meeting, May 7-May 12, 2006, Denver, Colorado

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