Concept for a Wafer Level Test System for Measuring Magnetic Film Properties

Concept for a Wafer Level Test System for Measuring Magnetic Film Properties

著者名:

掲載資料名:

Magnetic materials, processes, and devices 9

シリーズ名:

ECS transactions

シリーズ巻号:

3(25)

発行年:

2007

開始ページ:

165

終了ページ:

177

総ページ数:

13

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

19385862

ISBN:

9781566775601 [1566775604]

言語:

英語

請求記号:

E23400/3-25

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00047120
シリーズID:	PA00000034
会議名:	International Symposium on Magnetic Materials Processes and Devices ; Meeting of the Electrochemical Society
回次:	9th ; 210th
会議開催地:	Cancun, Mexico
会議開催年:	2006.10.31-2006.11.02
論文注記:	210th ECS Meeting, October 29-November 3, 2006, Cancun, Mexico

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