Novel Electrochemical Patterning Method of Silicon Carbide

Novel Electrochemical Patterning Method of Silicon Carbide

著者名:

掲載資料名:

Chemical Sensors 7 and MEMS/NEMS 7

シリーズ名:

ECS transactions

シリーズ巻号:

3(10)

発行年:

2006

開始ページ:

307

終了ページ:

314

総ページ数:

8

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

19385862

ISBN:

9781566775106 [1566775108]

言語:

英語

請求記号:

E23400/3-10

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00047118
シリーズID:	PA00000034
論文注記:	210th ECS Meeting, October 29-November 3, 2006, Cancun, Mexico

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