Poly-Si Thin Fim Transistor with Multiple Nanowire Channels Prepared by Excimer Laser Annealing

Poly-Si Thin Fim Transistor with Multiple Nanowire Channels Prepared by Excimer Laser Annealing

著者名:

掲載資料名:

Thin Film Transistor Technology 8

シリーズ名:

ECS transactions

シリーズ巻号:

3(8)

発行年:

2006

開始ページ:

179

終了ページ:

183

総ページ数:

5

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

19385862

ISBN:

9781566775083 [1566775086]

言語:

英語

請求記号:

E23400/3-8

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00047116
シリーズID:	PA00000034
会議名:	Symposium on Thin Film Transistor Technologies - TFT
回次:	8th
会議開催地:	Cancun, Mexico
会議開催年:	2006.10.29-2006.11.03
論文注記:	210th ECS Meeting, October 29-November 3, 2006, Cancun, Mexico

類似資料:

1 国際会議録 Characteristics of Schottky Barrier Poly-Si Thin-Film Transistors with Excimer Laser Annealing Treatment Yeh, K.-L., Lin, H.-C., Tsai, R.-W., Lee, M.-H., Huang, F.-Y. Electrochemical Society	7 国際会議録 Multiple Nanowire Channel Poly-Si TFTs with Defect Passivation T. Liao, S. Tu, W. Lin, C. Liu, K. Chang Electrochemical Society
2 国際会議録 Melting and Resolidification Dynamics of a-Si and Poly-Si Thin Films During Excimer Laser Annealing Grigoropoulos, C. P., Hatano, M., Lee, M., Moon, S., Suzuki, K. Materials Research Society	8 国際会議録 Raman Studies of Doped Poly-Si Thin Films Prepared by Pulsed Excimer Laser Annealing Compaan,A., Savage,M.E., Jayamaha,U., Azfar,T., Aydinli,A. Trans Tech Publications
3 国際会議録 High-Performance Low Temperature Poly-Silicon Thin Film Transistors Fabricated by Excimer Laser Irradiation with Bottom-Gate Scheme C. Tsai, H. Chen, Y. Lee, H. Cheng Electrochemical Society	9 国際会議録 Schottky Barrier Poly-Si Thin-Film Transistors with Nano-scale Channel Width Lin, H.-C., Lee, M.-H., Yeh, K.-L., Hou, F.-J., Wang, M.-F., Huang, F.-Y. Electrochemical Society
4 国際会議録 Poly-Si Thin Film Transistors Fabricated By Employing Selective Si Ion-Implantation And Excimer Laser Annealing Han, M. K., Jeon, J. H., Lee, M. C., Park, J. W. Materials Research Society	10 国際会議録 Analysis of the Hump Characteristics in Poly-Si Thin Film Transistor S. Kim, J. Oh, J. Yang, M. Yang, I. Chung Electrochemical Society
5 国際会議録 Transient temperature measurement of amorphous silicon thin films during excimer laser annealing Moon,S., Lee,M., Hatano,M., Suzuki,K., Grigoropoulos,C.P. SPIE - The International Society for Optical Engineering	11 国際会議録 Scanning Rapid Thermal Annealing Process for Low Temperature Poly-Silicon Thin Film Transistors Kim, F.-K., Kim, G.-B., Yoon, Y-G., Kim, C.-H., Lee, B.-I., Joo, S.-K. Electrochemical Society
6 国際会議録 Excimer-laser-crystallized poly-Si thin film transistors Gosain,D.P. SPIE-The International Society for Optical Engineering	12 国際会議録 Short Channel Poly-Si TFT with Single Grain Boundary by Excimer Laser Annealing on Al-Masked a-Si Layer Jung, Sang-Hoon, Lee, Jae-Hoon, Han, Min-Koo Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12