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Properties of Annealed Indium Tin Tantalum Oxide Films Prepared by Reactive Magnetron Sputtering

著者名:
Zhang, Bo  
掲載資料名:
Information engineering for mechanics and materials research : selected, peer reviewed papers from the 2013 International Conference on Information Engineering for Mechanics and Materials (ICIMM 2013), July 5-7, 2013, Hangzhou, China
シリーズ名:
Applied mechanics and materials
シリーズ巻号:
422
発行年:
2013
開始ページ:
70
終了ページ:
74
総ページ数:
5
出版情報:
Stafa-Zuerich: Trans Tech Publications
ISSN:
16609336
ISBN:
9783037858851 [3037858850]
言語:
英語
請求記号:
A69500/422
資料種別:
国際会議録

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