Magnetic Micro Electro-mechanical Systems for Sensor and Actuator Applications
- 著者名:
- H.H. Gatzen
- 掲載資料名:
- Magnetic Materials, Processes, and Devices 10
- シリーズ名:
- ECS transactions
- シリーズ巻号:
- 16(45)
- 発行年:
- 2009
- 開始ページ:
- 235
- 終了ページ:
- 253
- 総ページ数:
- 19
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781615673162 [1615673164]
- 言語:
- 英語
- 請求記号:
- E23400/16-43 [45]
- 資料種別:
- 国際会議録
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