Effect of Strained-Si Layer Thickness on Dislocation Distribution and SiGe Relaxation in Thin Buffer Layer Strained-Si/SiGe Heterostructures
類似資料:
MRS - Materials Research Society | |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Materials Research Society |
Materials Research Society |
10
国際会議録
Characterization of strained-Si/SiGe/Si heterostructures with capacatance methods [6260-44]
SPIE - The International Society of Optical Engineering |
Materials Research Society |
Materials Research Society |
Materials Research Society |
Materials Research Society |