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Etching Treatment of MILC Poly-Si TFTs Using CF4 Plasma to Improve Electrical Performance

著者名:
掲載資料名:
Thin Film Transistors 9
シリーズ名:
ECS transactions
シリーズ巻号:
16(9)
発行年:
2008
開始ページ:
197
終了ページ:
199
総ページ数:
3
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
19385862
ISBN:
9781566776554 [1566776554]
言語:
英語
請求記号:
E23400/16-9
資料種別:
国際会議録

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