Stress Reduction of Ge2Sb2Te5 Crystallization by Capping Al2O3 Film Grown by PEALD

Stress Reduction of Ge2Sb2Te5 Crystallization by Capping Al2O3 Film Grown by PEALD

著者名:

掲載資料名:

Atomic layer deposition applications 3

シリーズ名:

ECS transactions

シリーズ巻号:

11(7)

発行年:

2007

開始ページ:

245

終了ページ:

248

総ページ数:

4

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

19385862

ISBN:

9781566775731 [1566775736]

言語:

英語

請求記号:

E23400/11-7

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00052897
シリーズID:	PA00000034
会議名:	Symposium on Atomic Layer Deposition Applications ; Meeting of the Electrochemical Society
回次:	3rd ; 212th
会議開催地:	Washington, DC, USA
会議開催年:	2007.10.08-2007.10.09
論文注記:	3rd Symposium on Atomic Layer Deposition Applications, 212th Meeting of the Electrochemical Society, Hilton Washington, Washington, DC, October 8-9, 2007

類似資料:

1 国際会議録 TuD3:Crystallization behavior of sputter-deposited nitrogen-doped amorphous Ge2Sb2Te5 thin films Seo,H., Jeong,T.-H., Park,J.-W., Yeon,C., Lee,D.-C., Kim,S.-J., Lim,H.-J., Kim,S.-Y. SPIE - The International Society for Optical Engineering	7 国際会議録 Morphological impact of V2O5/Al2O3 catalyst on the deactivation by SO2 for the reduction of NO with NH3 Soh, B. -W., Nam, I. -S., Lee, J. -B., Kim, Y. G. Elsevier
2 国際会議録 Oxidant Effect on Resistance Switching Characteristics of HfO2 film Grown Atomic Layer Deposition I. Park, J. Lee, S. Yoon, K. Jung, S. Lee Electrochemical Society	8 国際会議録 TEM Observation of Interfacial Reaction Layers Formed Between Pb(Lead)-Free Sn-3.5Ag Solder and ENIG Plated Cu Substrate Yoon, J.W., Jung, S.B. Trans Tech Publications
3 国際会議録 Fabrication of TFA-MOD YBCO Films Using the Y2Ba1Cu1Ox and Ba3Cu5O8 Powders J.H. Lim, S.H. Jang, K.M. Yoon, S.Y. Lee, J.H. Joo, H.J. Lee, C.J. Kim Trans Tech Publications	9 国際会議録 Low-Temperature Polycrystalline Si TFTs Fabricated With Directionally Crystallized Si Film Jung, Y.H., Yoon, J.M., Yang, M.S., Park, W.K., Soh, H.S., Cho, H.S., Limanov, A.B., Im, J.S. Materials Research Society
4 国際会議録 Growth Kinetics of IMC Formed between Sn-3.5Ag-0.75Cu BGA Solder and Electroless Ni-P/Cu Substrate by Solid-State Isothermal Aging Yoon, J.W., Lee, C.B., Jung, S.B. Trans Tech Publications	10 国際会議録 Crystallization and Wet Etching Characteristics of Atomic Layer Deposited HfO₂ Films Using Hf[N(CH₃)(C₂H₅)]₃[OC(CH₃)₃]) Precursor and O₃ Oxidant M. Seo, S. Kim, K. Kim, T. Park, J. Kim, C. Hwang, H. Cho Electrochemical Society
5 国際会議録 Wear Properties of Bulk Amorphous Zr41.2 Ti13.8Cu12.5Ni10Be22.5 Alloys for Crystallization Lee, B. J., Song, D. H., Cho, K. M., Park, I. M., Kim, K. H., Yoon, S. Y., Cho, Y. R. Trans Tech Publications	11 国際会議録 Studies of the Crystallization of ZSM-5 under High Gravitational Force Field Kim, W. J., Hayhurst, D. T., Lee, S. A., Lee, M. C., Lim, C. W., Yoo, J. C. Elsevier
6 国際会議録 Effects of Misfit Strain on Properties of ZnO Films Grown by Pulsed Laser Deposition Park, M.C., Yoon, W.H., Lee, D.H., Myoung, J.M., Bae, S.H., Lee, S.Y., Yun, I. Materials Research Society	12 国際会議録 *Integration issues of (Ba,Sr) TiO3 thin films in high density devices Yoo, C. Y., Park, H. B., Hwang, D. S., Hideki, H., Kim, W. D., Lim, H. J., Lee, B. T., Park, Y. W., Lee, S. I., Lee, M. … MRS-Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12